ALIGNABLE DEPOSITION OF THIN-FILM SEMICONDUCTOR-MATERIALS FOR INTEGRATED MICRO-OPTO-ELECTRONIC SYSTEMS

Journal Article

Full Text

Duke Authors

Cited Authors

  • CAMPERIGINESTET, C; JOKERST, NM; AUGUSTINE, G; HARGIS, M; ALLEN, M

Published Date

  • 1992

Published In

  • SMART MATERIALS FABRICATION AND MATERIALS FOR MICRO-ELECTRO-MECHANICAL SYSTEMS

Volume / Issue

  • 276 /

Start / End Page

  • 131 - 136

Digital Object Identifier (DOI)

  • 10.1557/PROC-276-131