Alignable Deposition of Thin Film Semiconductor Materials for Integrated Micro-Opto-Electronic Systems

Published

Journal Article

Full Text

Duke Authors

Cited Authors

  • Camperi-Ginestet, C; Jokerst, NM; Augustine, G; Hargis, M; Allen, M

Published Date

  • January 1, 1992

Published In

Volume / Issue

  • 276 /

Chapter

  • 131

Published By

Electronic International Standard Serial Number (EISSN)

  • 1946-4274

Digital Object Identifier (DOI)

  • 10.1557/proc-276-131

Language

  • en