3-D stacked thin-film photodetectors for multispectral detection applications

Journal Article (Journal Article)

To demonstrate simultaneous multispectral detection, short and long wavelength thin-film detectors, which are grown and optimized separately, are collocated and heterogeneously integrated in a three-dimensional (3-D) stack onto pads on an Si substrate. Simultaneous two-color detection by each detector in the 3-D stack has been measured and theoretically explored. This heterogeneous integration of two different detectors in a 3-D stack is an interesting physical integration technology for multispectral imaging systems and coarse wavelength-division-multiplexing systems.

Full Text

Duke Authors

Cited Authors

  • Seo, SW; Geddis, DL; Jokerst, NM

Published Date

  • April 1, 2003

Published In

Volume / Issue

  • 15 / 4

Start / End Page

  • 578 - 580

International Standard Serial Number (ISSN)

  • 1041-1135

Digital Object Identifier (DOI)

  • 10.1109/LPT.2003.809273

Citation Source

  • Scopus