3-D stacked thin-film photodetectors for multispectral detection applications
Journal Article (Journal Article)
To demonstrate simultaneous multispectral detection, short and long wavelength thin-film detectors, which are grown and optimized separately, are collocated and heterogeneously integrated in a three-dimensional (3-D) stack onto pads on an Si substrate. Simultaneous two-color detection by each detector in the 3-D stack has been measured and theoretically explored. This heterogeneous integration of two different detectors in a 3-D stack is an interesting physical integration technology for multispectral imaging systems and coarse wavelength-division-multiplexing systems.
Full Text
Duke Authors
Cited Authors
- Seo, SW; Geddis, DL; Jokerst, NM
Published Date
- April 1, 2003
Published In
Volume / Issue
- 15 / 4
Start / End Page
- 578 - 580
International Standard Serial Number (ISSN)
- 1041-1135
Digital Object Identifier (DOI)
- 10.1109/LPT.2003.809273
Citation Source
- Scopus