Integration of thin film optoelectronic devices onto micromachined movable platforms

Journal Article

The integration of a thin film optoelectronic device onto a micromachined movable platform is reported in this letter. This micro-opto-mechanical system, consisting of a thin film AlGaAs/GaAs double heterostructure p-i-n detector integrated onto a polyimide micromachined platform on silicon, has applications which range from fiber optic coupling to sensors. Fiber optic coupling is demonstrated using a stationary fiber positioned above the thin film detector. By applying a voltage between the platform and actuation strips, the platform moves and a change in fiber to detector coupling is observed.

Full Text

Duke Authors

Cited Authors

  • Wilkinson, ST; Kim, YW; Jokerst, NM; Allen, MG

Published Date

  • 1994

Published In

  • IEEE Photonics Technology Letters

Volume / Issue

  • 6 / 9

Start / End Page

  • 1115 - 1118

Digital Object Identifier (DOI)

  • 10.1109/68.324685