Integration of Thin Film Optoelectronic Devices onto Micromachined Movable Platforms

Journal Article (Journal Article)

The integration of a thin film optoelectronic device onto a micromachined movable platform is reported in this letter. This micro-opto-mechanical system, consisting of a thin film AlGaAs/GaAs double heterostructure p-i-n detector integrated onto a polyimide micromachined platform on silicon, has applications which range from fiber optic coupling to sensors. Fiber optic coupling is demonstrated using a stationary fiber positioned above the thin film detector. By applying a voltage between the platform and actuation strips, the platform moves and a change in fiber to detector coupling is observed. © 1994 IEEE

Full Text

Duke Authors

Cited Authors

  • Wilkinson, ST; Kim, YW; Jokerst, NM; Allen, MG

Published Date

  • January 1, 1994

Published In

Volume / Issue

  • 6 / 9

Start / End Page

  • 1115 - 1118

Electronic International Standard Serial Number (EISSN)

  • 1941-0174

International Standard Serial Number (ISSN)

  • 1041-1135

Digital Object Identifier (DOI)

  • 10.1109/68.324685

Citation Source

  • Scopus