Embedded optical interconnections using thin film InGaAs metal-semiconductor-metal photodetectors
Published
Journal Article
The integration of InGaAs photodetectors embedded in a polymer interconnection waveguide on Si and ceramic electrical interconnection substrates has been demonstrated. The photodetector and substrate are independently fabricated and bonded, with subsequent waveguide integration. The embedding fabrication process, coupling, and bandwidth are reported at 1 Gbit/s.
Full Text
Duke Authors
Cited Authors
- Huang, Z; Ueno, Y; Kaneko, K; Jokerst, NM; Tanahashi, S
Published Date
- December 5, 2002
Published In
Volume / Issue
- 38 / 25
Start / End Page
- 1708 - 1709
International Standard Serial Number (ISSN)
- 0013-5194
Digital Object Identifier (DOI)
- 10.1049/el:20021047
Citation Source
- Scopus