A polymer microdisk photonic sensor integrated onto silicon
Abstract-Optical sensors are attractive for integrated chip-scale sensor systems. In this letter, integrated microdisk sensors have been fabricated and characterized for five different D-glucose concentrations in deionized water. The microdisk sensor reported is in an orthogonal configuration, reducing the sensor size toward chip-scale sensor applications. The measured wavelength shift in the resonant peak of the microdisk sensors has a linear response as a function of D-glucose concentration. The estimated sensitivity (defined by Δλresonant/wt%D-glucose) of the fabricated microdisk sensor for the D-glucose solution was 0.12 [nm/wt%] based on the slope of the linear regression line from the measured results.
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