Epitaxial lift-off GaAs/AlGaAs metal-semiconductor-metal photodetectors with back passivation

Journal Article

High-performance thin-film epitaxial lift-off (ELO) photodetectors have potential for integration with independently optimized integrated circuits and waveguides. In this paper, the dark current, responsivity, and frequency response of GaAs/AlGaAs metal-semiconductor-metal (MSM) photodetectors that remain on the growth substrate are compared to ELO detectors with and without back passivation. The passivated ELO detectors perform comparably to the on-wafer devices, while the unpassivated devices exhibit performance degradation. In addition to demonstrating the importance of back passivation, this paper presents the lowest ELO MSM dark current (5 nA at 5 V) for a 200-μm-diameter device published to date.

Full Text

Duke Authors

Cited Authors

  • Hargis, MC; Carnahan, RE; Brown, JS; Jokerst, NM

Published Date

  • 1993

Published In

  • IEEE Photonics Technology Letters

Volume / Issue

  • 5 / 10

Start / End Page

  • 1210 - 1212

Digital Object Identifier (DOI)

  • 10.1109/68.248430