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Integrated optoelectronics using thin film epitaxial liftoff materials and devices

Publication ,  Journal Article
Jokerst, NM
Published in: Journal of Nonlinear Optical Physics and Materials
January 1, 1997

The separation of single crystal thin film epitaxial compound semiconductor layers from a lattice matched growth substrate through selective etching, with subsequent bonding of the epitaxial thin film devices onto host substrates, is an emerging tool for multi-material, hybrid integration. Progress to date in this area, presented herein, includes advanced thin film devices, thin film material separation and device integration processing techniques, and thin film material and device integration with host substrates which include silicon circuitry, polymers, glass, and lithium niobate.

Duke Scholars

Published In

Journal of Nonlinear Optical Physics and Materials

DOI

ISSN

0218-8635

Publication Date

January 1, 1997

Volume

6

Issue

1

Start / End Page

19 / 48

Related Subject Headings

  • Optics
  • 5102 Atomic, molecular and optical physics
  • 0205 Optical Physics
 

Citation

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ICMJE
MLA
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Jokerst, N. M. (1997). Integrated optoelectronics using thin film epitaxial liftoff materials and devices. Journal of Nonlinear Optical Physics and Materials, 6(1), 19–48. https://doi.org/10.1142/S0218863597000034
Jokerst, N. M. “Integrated optoelectronics using thin film epitaxial liftoff materials and devices.” Journal of Nonlinear Optical Physics and Materials 6, no. 1 (January 1, 1997): 19–48. https://doi.org/10.1142/S0218863597000034.
Jokerst NM. Integrated optoelectronics using thin film epitaxial liftoff materials and devices. Journal of Nonlinear Optical Physics and Materials. 1997 Jan 1;6(1):19–48.
Jokerst, N. M. “Integrated optoelectronics using thin film epitaxial liftoff materials and devices.” Journal of Nonlinear Optical Physics and Materials, vol. 6, no. 1, Jan. 1997, pp. 19–48. Scopus, doi:10.1142/S0218863597000034.
Jokerst NM. Integrated optoelectronics using thin film epitaxial liftoff materials and devices. Journal of Nonlinear Optical Physics and Materials. 1997 Jan 1;6(1):19–48.
Journal cover image

Published In

Journal of Nonlinear Optical Physics and Materials

DOI

ISSN

0218-8635

Publication Date

January 1, 1997

Volume

6

Issue

1

Start / End Page

19 / 48

Related Subject Headings

  • Optics
  • 5102 Atomic, molecular and optical physics
  • 0205 Optical Physics