Direct fusion bonding of silicon to polycrystalline diamond
Publication
, Journal Article
Wolter, SD; Yushin, GN; Okuzumi, F; Stoner, BR; Prater, JT; Sitar, Z
Published in: Diamond and Related Materials
2002
High temperature fusion of silicon to diamond is reported. Polished, randomly oriented diamond films and unpolished (100) highly oriented diamond films were bonded to single-side polished (100) silicon in a dedicated ultrahigh vacuum bonding apparatus. Direct bonding under an applied uniaxial stress of [similar to] 32 MPa was observed at temperatures above 950 °C. The bonded interface was examined by scanning acoustic microscopy revealing only partial bonding at fusion temperatures of 950 and 1050 °C. In contrast, complete bonding was evidenced at 1150 and 1200 °C, although cracking of the diamond films became more prominent at these higher fusion temperatures. © 2002 Elsevier Science B.V. All rights reserved.
Duke Scholars
Published In
Diamond and Related Materials
DOI
Publication Date
2002
Volume
11
Issue
3-6
Start / End Page
482 / 486
Related Subject Headings
- Applied Physics
- 5104 Condensed matter physics
- 4018 Nanotechnology
- 4016 Materials engineering
- 0912 Materials Engineering
- 0910 Manufacturing Engineering
- 0904 Chemical Engineering
Citation
APA
Chicago
ICMJE
MLA
NLM
Wolter, S. D., Yushin, G. N., Okuzumi, F., Stoner, B. R., Prater, J. T., & Sitar, Z. (2002). Direct fusion bonding of silicon to polycrystalline diamond. Diamond and Related Materials, 11(3–6), 482–486. https://doi.org/10.1016/S0925-9635(01)00608-2
Wolter, S. D., G. N. Yushin, F. Okuzumi, B. R. Stoner, J. T. Prater, and Z. Sitar. “Direct fusion bonding of silicon to polycrystalline diamond.” Diamond and Related Materials 11, no. 3–6 (2002): 482–86. https://doi.org/10.1016/S0925-9635(01)00608-2.
Wolter SD, Yushin GN, Okuzumi F, Stoner BR, Prater JT, Sitar Z. Direct fusion bonding of silicon to polycrystalline diamond. Diamond and Related Materials. 2002;11(3–6):482–6.
Wolter, S. D., et al. “Direct fusion bonding of silicon to polycrystalline diamond.” Diamond and Related Materials, vol. 11, no. 3–6, 2002, pp. 482–86. Manual, doi:10.1016/S0925-9635(01)00608-2.
Wolter SD, Yushin GN, Okuzumi F, Stoner BR, Prater JT, Sitar Z. Direct fusion bonding of silicon to polycrystalline diamond. Diamond and Related Materials. 2002;11(3–6):482–486.
Published In
Diamond and Related Materials
DOI
Publication Date
2002
Volume
11
Issue
3-6
Start / End Page
482 / 486
Related Subject Headings
- Applied Physics
- 5104 Condensed matter physics
- 4018 Nanotechnology
- 4016 Materials engineering
- 0912 Materials Engineering
- 0910 Manufacturing Engineering
- 0904 Chemical Engineering