Oxidation, Impurity Diffusion, and Defect Growth in Silicon—An Overview

Published

Journal Article

Full Text

Duke Authors

Cited Authors

  • Fair, RB

Published Date

  • 1981

Published In

Volume / Issue

  • 128 / 6

Start / End Page

  • 1360 - 1360

Published By

International Standard Serial Number (ISSN)

  • 0013-4651

Digital Object Identifier (DOI)

  • 10.1149/1.2127636

Language

  • en