Cooperative effects between arsenic and boron in silicon during simultaneous diffusions from ion implanted and chemical source predepositions

Published

Journal Article

Full Text

Duke Authors

Cited Authors

  • Fair, RB

Published Date

  • January 1, 1974

Published In

Volume / Issue

  • 17 / 1

Start / End Page

  • 17 - 24

Published By

International Standard Serial Number (ISSN)

  • 0038-1101

Digital Object Identifier (DOI)

  • 10.1016/0038-1101(74)90108-7

Language

  • en