The gettering of boron by an ion-implanted antimony layer in silicon

Published

Journal Article

Full Text

Duke Authors

Cited Authors

  • Fair, RB; Pappas, PN

Published Date

  • December 1, 1975

Published In

Volume / Issue

  • 18 / 12

Start / End Page

  • 1131 - 1134

Published By

International Standard Serial Number (ISSN)

  • 0038-1101

Digital Object Identifier (DOI)

  • 10.1016/0038-1101(75)90179-3

Language

  • en