The role of transient damage annealing in shallow junction formation

Published

Journal Article

Full Text

Duke Authors

Cited Authors

  • Fair, RB

Published Date

  • February 1989

Published In

Volume / Issue

  • 37-38 /

Start / End Page

  • 371 - 378

Published By

International Standard Serial Number (ISSN)

  • 0168-583X

Digital Object Identifier (DOI)

  • 10.1016/0168-583x(89)90206-1

Language

  • en