Integrated force array: positioning drive applications

Published

Journal Article

Integrated Force Arrays (IFAs) are thin film membrane actuators that act as transfer devices for electrostatic force. They are capable of large amplitude motion and evidence significant energies per unit volume (eg. 8.2 erg/mm 3). Devices which use IFAs as drivers to scan PZT acoustic imaging transducers are under development and will be discussed here.

Duke Authors

Cited Authors

  • Bobbio, SM; Goodwin-Johansson, S; DuBois, TD; Tranjan, FM; Smith, SW; Fair, RB; Ball, C; Jacobson, J; Bartlett, C; Eleyan, N; Makki, H; Gupta, R

Published Date

  • January 1, 1996

Published In

  • Proceedings of Spie the International Society for Optical Engineering

Volume / Issue

  • 2722 /

Start / End Page

  • 123 - 134

Citation Source

  • Scopus