Profile Estimation of High‐Concentration Arsenic Diffusions in Silicon

Published

Journal Article

Full Text

Duke Authors

Cited Authors

  • Fair, RB

Published Date

  • March 1972

Published In

Volume / Issue

  • 43 / 3

Start / End Page

  • 1278 - 1280

Published By

Electronic International Standard Serial Number (EISSN)

  • 1089-7550

International Standard Serial Number (ISSN)

  • 0021-8979

Digital Object Identifier (DOI)

  • 10.1063/1.1661253

Language

  • en