Defect and interface structures of diamond thin films

Diamond films grown by microwave plasma CVD have been examined by Transmission Electron Microscopy (TEM) and High Resolution TEM (HRTEM). It was found that columnar growth of polycrystalline grain structure, twins, stacking faults, dislocations and intermediate layers were characteristic of the diamond films.

Duke Authors

Cited Authors

  • Williams, B; Glass, J; Davis, R

Published Date

  • 1992

Published In

  • R and D: Research and Development Kobe Steel Engineering Reports

Volume / Issue

  • 42 / 2

Start / End Page

  • 13 - 16

Citation Source

  • SciVal