Summary Abstract: Epitaxial growth, doping, and analytical characterization of monocrvstalline beta-SiC semiconductor thin films

Published

Journal Article

Full Text

Duke Authors

Cited Authors

  • Kim, HJ; Kong, H; Edmond, JA; Ryu, J; Palmour, J; Carter, CH; Glass, JT; Davis, RF

Published Date

  • January 1, 1988

Published In

Volume / Issue

  • 6 / 3

Start / End Page

  • 1954 - 1956

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

International Standard Serial Number (ISSN)

  • 0734-2101

Digital Object Identifier (DOI)

  • 10.1116/1.575214

Citation Source

  • Scopus