Characterization of diamond thin films: Diamond phase identification, surface morphology, and defect structures

Thin carbon films grown from a low pressure methane-hydrogen gas mixture by microwave plasma enhanced CVD have been examined by Auger electron spectroscopy, secondary ion mass spectrometry, electron and x-ray diffraction, electron energy loss spectroscopy, and electron microscopy. They were determined to be similar to natural diamond in terms of composition, structure, and bonding. The surface morphology of the diamond films was a function of position on the sample surface and the methane concentration in the feedgas. Well-faceted diamond crystals were observed near the center of the sample whereas a less faceted, cauliflower texture was observed near the edge of the sample, presumably due to variations in temperature across the surface of the sample.

Duke Authors

Cited Authors

  • Williams, BE; Glass, JT

Published Date

  • 1989

Published In

  • Journal of Materials Research

Volume / Issue

  • 4 / 2

Start / End Page

  • 373 - 384

Citation Source

  • SciVal