Optical MEMS devices for telecom systems

Journal Article

As telecom networks increase in complexity there is a need for systems capable of managing numerous optical signals. Many of the channel-manipulation functions can be done more effectively in optical domain. MEMS devices are especially well suited for these applications since they can offer a large number of degrees of freedom in a limited space, thus providing high levels of optical integration. We have designed, fabricated and tested optical MEMS devices at the core of optical cross connects, channelized filters and wavelength-selective switches based on different fabrication technologies such as polysilicon surface micromachining and single crystal SOI. We show specific examples of these devices, discussing design trade-offs between technologies, fabrication requirements and optical performance.

Full Text

Duke Authors

Cited Authors

  • Pardo, F; Aksyuk, VA; Arney, S; Bair, H; Basavanhally, NR; Bishop, DJ; Bogart, GR; Bolle, CA; Bower, JE; Carr, D; Chan, HB; Cirelli, R; Ferry, E; Frahm, R; Gasparyan, A; Gates, JV; Giles, CR; Gomez, L; Goyal, S; Greywall, DS; Haueis, M; Keller, RC; Kim, J; Klemens, FP; Kolodner, P; Kornblit, A; Kroupenkine, T; Lai, W; Lifton, V; Liu, JQ; Low, Y; Mansfield, W; Marom, D; Miner, JF; Neilson, DT; Paczkowski, M; Pai, CS; Ramirez, A; Ramsey, D; Rogers, S; Ryf, R; Scotti, R; Shea, H; Simon, ME; Soh, HT; Tang, H; Taylor, JA; Teffeau, K; Vuillemin, J; Weld, J

Published Date

  • 2003

Published In

  • Proceedings of Spie the International Society for Optical Engineering

Volume / Issue

  • 5116 II /

Start / End Page

  • 435 - 444

Digital Object Identifier (DOI)

  • 10.1117/12.499075