Beam-steering micromirrors for large optical cross-connects

Journal Article

This paper describes Si-micromachined two-axis beam-steering micromirrors and their performance in 256 × 256-and 1024 × 1024-port large optical cross-connects (OXCs). The high-reflectivity wavelength-independent mirrors are electrostatically actuated; capable of large, continuous, controlled, dc tilt in any direction at moderate actuation voltages; and allow setting times of a few milliseconds. Packaged two-dimensional (2-D) arrays containing independently addressable identical 256 and 1296 mirrors are used to build fully functional bitrate and wavelength-independent single-stage, low-insertion-loss, single-mode fiber OCX fabrics.

Full Text

Duke Authors

Cited Authors

  • Aksyuk, VA; Pardo, F; Carr, D; Greywall, D; Chan, HB; Simon, ME; Gasparyan, A; Shea, H; Lifton, V; Bolle, C; Arney, S; Frahm, R; Paczkowski, M; Haueis, M; Ryf, R; Neilson, DT; Kim, J; Giles, CR; Bishop, D

Published Date

  • 2003

Published In

  • Journal of Lightwave Technology

Volume / Issue

  • 21 / 3

Start / End Page

  • 634 - 642

Digital Object Identifier (DOI)

  • 10.1109/JLT.2003.811792