Harmonic balance nonlinear identification from steady state response of a dual backplate MEMS microphone

Duke Authors

Cited Authors

  • Liu, J; Martin, DT; Kadirvel, K; Nishida, T; Catafesta, LN; Sheplak, M; Mann, BP

Published Date

  • 2008

Published In

  • Journal of Microelectromechanical Systems

Volume / Issue

  • 117 / 3

Start / End Page

  • 1358 - 1370