To build a large-scale quantum information processor (QIP) based on trapped ions or neutral atoms, integrated optical systems capable of delivering laser beams to multiple target locations are necessary. We consider a beam-shifting element consisting of a tilting micromirror located at the focal point of a lens, as a fundamental building block for such a system. We explore the design space of the micromirrors and characterize their dc, frequency, and transient responses. The fastest mirror features the resonant frequency of 113 kHz and the 98% settling time of 11 μs. The design tradeoffs are discussed to facilitate further optimization of the mirror performance for this application. © 2007 IEEE.