Design and characterization of MEMS micromirrors for ion-trap quantum computation

Journal Article

To build a large-scale quantum information processor (QIP) based on trapped ions or neutral atoms, integrated optical systems capable of delivering laser beams to multiple target locations are necessary. We consider a beam-shifting element consisting of a tilting micromirror located at the focal point of a lens, as a fundamental building block for such a system. We explore the design space of the micromirrors and characterize their dc, frequency, and transient responses. The fastest mirror features the resonant frequency of 113 kHz and the 98% settling time of 11 μs. The design tradeoffs are discussed to facilitate further optimization of the mirror performance for this application. © 2007 IEEE.

Full Text

Duke Authors

Cited Authors

  • Kim, C; Knoernschild, C; Liu, B; Kim, J

Published Date

  • 2007

Published In

Volume / Issue

  • 13 / 2

Start / End Page

  • 322 - 329

International Standard Serial Number (ISSN)

  • 1077-260X

Digital Object Identifier (DOI)

  • 10.1109/JSTQE.2007.893561