Growth of patterned nanopore arrays of anodic aluminum oxide

Published

Journal Article

A convenient and inexpensive procedure to fabricate highly ordered, patterned through-hole nanopore arrays with intermittent aluminum supports was developed. As such, silica was found to be an effective anodization barrier to generate patterned ordered nanopore arrays. This paper allows facile incorporation of AAO in a robust form into microdevices for microelectronics, microfluidics, and integrated optics.

Full Text

Cited Authors

  • Yan, J; Rao, GVR; Barela, M; Brevnov, DA; Jiang, Y; Xu, H; López, GP; Atanassov, PB

Published Date

  • December 3, 2003

Published In

Volume / Issue

  • 15 / 23

Start / End Page

  • 2015 - 2018

International Standard Serial Number (ISSN)

  • 0935-9648

Digital Object Identifier (DOI)

  • 10.1002/adma.200305360

Citation Source

  • Scopus