Harmonic balance nonlinear identification of a capacitive dual-backplate MEMS microphone

Journal Article (Journal Article)

This paper describes the application of a nonlinear identification method to extract model parameters from the steady-state response of a capacitive dual-backplate microelectromechanical systems microphone. The microphone is modeled as a single-degree-of-freedom second-order system with both electrostatic and mechanical nonlinearities. A harmonic balance approach is applied to the nonlinear governing equation to obtain a set of algebraic equations that relate the unknown system parameters to the steady-state response of the microphone. Numerical simulations of the governing equation are also performed, using theoretical system parameters, to validate the accuracy of the harmonic balance solution for a weakly nonlinear microphone system with low damping. Finally, the microphone is experimentally characterized by extracting the system parameters from the response amplitude and phase relationships of the experimental data. © 2008 IEEE.

Full Text

Duke Authors

Cited Authors

  • Liu, J; Martin, DT; Nishida, T; Cattafesta, LN; Sheplak, M; Mann, BP

Published Date

  • June 1, 2008

Published In

Volume / Issue

  • 17 / 3

Start / End Page

  • 698 - 708

International Standard Serial Number (ISSN)

  • 1057-7157

Digital Object Identifier (DOI)

  • 10.1109/JMEMS.2008.922067

Citation Source

  • Scopus