Radial distribution function analyses of amorphous carbon thin films containing various levels of silicon and hydrogen

Journal Article (Journal Article)

The use of radial distribution functions (RDF) for the characterization of amorphous carbon thin films containing silicon and hydrogen (Si-aC:H) was analyzed. The average number of neighbours located a distance r from away from an arbitrary atom in the sample was described by RDFs. Energy-filtered convergent-beam electron diffraction (EFCBED) and extended electron energy-loss fine structure (EXELFS) analyses were the methods, in the transmission electron microscope (TEM), to be used to obtain RDFs. The RDF characteristics were found to be correlated to thin film material properties.

Full Text

Duke Authors

Cited Authors

  • Evans, RD; Bentley, J; More, KL; Doll, GL; Glass, JT

Published Date

  • July 1, 2004

Published In

Volume / Issue

  • 96 / 1

Start / End Page

  • 273 - 279

International Standard Serial Number (ISSN)

  • 0021-8979

Digital Object Identifier (DOI)

  • 10.1063/1.1760232

Citation Source

  • Scopus