On-chip electron-impact ion source using carbon nanotube field emitters
Publication
, Journal Article
Bower, CA; Gilchrist, KH; Piascik, JR; Stoner, BR; Natarajan, S; Parker, CB; Wolter, SD; Glass, JT
Published in: Applied Physics Letters
March 2007
A lateral on-chip electron-impact ion source utilizing a carbon nanotube field emission electron source was fabricated and characterized. The device consists of a cathode with aligned carbon nanotubes, a control grid, and an ion collector electrode. The electron-impact ionization of He, Ar, and Xe was studied as a function of field emission current and pressure. The ion current was linear with respect to gas pressure from 10-4 to 10-1 Torr. The device can operate as a vacuum ion gauge with a sensitivity of approximately 1 Torr-1. Ion currents in excess of 1 μA were generated. © 2007 American Institute of Physics.
Duke Scholars
Published In
Applied Physics Letters
DOI
Publication Date
March 2007
Volume
90
Issue
12
Start / End Page
124102
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 10 Technology
- 09 Engineering
- 02 Physical Sciences
Citation
APA
Chicago
ICMJE
MLA
NLM
Bower, C. A., Gilchrist, K. H., Piascik, J. R., Stoner, B. R., Natarajan, S., Parker, C. B., … Glass, J. T. (2007). On-chip electron-impact ion source using carbon nanotube field emitters. Applied Physics Letters, 90(12), 124102. https://doi.org/10.1063/1.2715457
Bower, Christopher A., Kristin H. Gilchrist, Jeffrey R. Piascik, Brian R. Stoner, Srividya Natarajan, Charles B. Parker, Scott D. Wolter, and Jeffrey T. Glass. “On-chip electron-impact ion source using carbon nanotube field emitters.” Applied Physics Letters 90, no. 12 (March 2007): 124102. https://doi.org/10.1063/1.2715457.
Bower CA, Gilchrist KH, Piascik JR, Stoner BR, Natarajan S, Parker CB, et al. On-chip electron-impact ion source using carbon nanotube field emitters. Applied Physics Letters. 2007 Mar;90(12):124102.
Bower, Christopher A., et al. “On-chip electron-impact ion source using carbon nanotube field emitters.” Applied Physics Letters, vol. 90, no. 12, Mar. 2007, p. 124102. Manual, doi:10.1063/1.2715457.
Bower CA, Gilchrist KH, Piascik JR, Stoner BR, Natarajan S, Parker CB, Wolter SD, Glass JT. On-chip electron-impact ion source using carbon nanotube field emitters. Applied Physics Letters. 2007 Mar;90(12):124102.
Published In
Applied Physics Letters
DOI
Publication Date
March 2007
Volume
90
Issue
12
Start / End Page
124102
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 10 Technology
- 09 Engineering
- 02 Physical Sciences