High voltage microelectromechanical systems platform for fully integrated, on-chip, vacuum electronic devices

We demonstrate a fully integrated, on-chip, vacuum microtriode capable of handling voltages up to 800 V. The ability to operate at such high voltages is achieved by the addition of a 10 μm thick silicon dioxide layer to the device. The device is fabricated using microelectromechanical systems fabrication principles and utilizes carbon nanotubes as field emitters. A dc amplification factor of 600 was obtained. This is the highest value reported for carbon nanotube-enabled microtriode devices. The high voltage capability of these microscale devices will enable their use in a wider variety of applications. © 2008 American Institute of Physics.

Full Text

Duke Authors

Cited Authors

  • Natarajan, S; Parker, CB; Glass, JT; Piascik, JR; Gilchrist, KH; Bower, CA; Stoner, BR

Published Date

  • 2008

Published In

Volume / Issue

  • 92 / 22

International Standard Serial Number (ISSN)

  • 0003-6951

Digital Object Identifier (DOI)

  • 10.1063/1.2938075

Citation Source

  • SciVal