High voltage microelectromechanical systems platform for fully integrated, on-chip, vacuum electronic devices
Publication
, Journal Article
Natarajan, S; Parker, CB; Glass, JT; Piascik, JR; Gilchrist, KH; Bower, CA; Stoner, BR
Published in: Applied Physics Letters
June 2008
We demonstrate a fully integrated, on-chip, vacuum microtriode capable of handling voltages up to 800 V. The ability to operate at such high voltages is achieved by the addition of a 10 mu m thick silicon dioxide layer to the device. The device is fabricated using microelectromechanical systems fabrication principles and utilizes carbon nanotubes as field emitters. A dc amplification factor of 600 was obtained. This is the highest value reported for carbon nanotube-enabled microtriode devices. The high voltage capability of these microscale devices will enable their use in a wider variety of applications. (c) 2008 American Institute of Physics.
Duke Scholars
Published In
Applied Physics Letters
ISSN
0003-6951
Publication Date
June 2008
Volume
92
Issue
22
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 10 Technology
- 09 Engineering
- 02 Physical Sciences
Citation
APA
Chicago
ICMJE
MLA
NLM
Natarajan, S., Parker, C. B., Glass, J. T., Piascik, J. R., Gilchrist, K. H., Bower, C. A., & Stoner, B. R. (2008). High voltage microelectromechanical systems platform for fully integrated, on-chip, vacuum electronic devices. Applied Physics Letters, 92(22).
Natarajan, Srividya, Charles B. Parker, Jeffrey T. Glass, Jeffrey R. Piascik, Kristin H. Gilchrist, Christopher A. Bower, and Brian R. Stoner. “High voltage microelectromechanical systems platform for fully integrated, on-chip, vacuum electronic devices.” Applied Physics Letters 92, no. 22 (June 2008).
Natarajan S, Parker CB, Glass JT, Piascik JR, Gilchrist KH, Bower CA, et al. High voltage microelectromechanical systems platform for fully integrated, on-chip, vacuum electronic devices. Applied Physics Letters. 2008 Jun;92(22).
Natarajan, Srividya, et al. “High voltage microelectromechanical systems platform for fully integrated, on-chip, vacuum electronic devices.” Applied Physics Letters, vol. 92, no. 22, June 2008.
Natarajan S, Parker CB, Glass JT, Piascik JR, Gilchrist KH, Bower CA, Stoner BR. High voltage microelectromechanical systems platform for fully integrated, on-chip, vacuum electronic devices. Applied Physics Letters. 2008 Jun;92(22).
Published In
Applied Physics Letters
ISSN
0003-6951
Publication Date
June 2008
Volume
92
Issue
22
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 10 Technology
- 09 Engineering
- 02 Physical Sciences