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Investigation of the low angle grain boundaries in highly oriented diamond films via transmission electron microscopy

Publication ,  Journal Article
Sivazlian, FR; Glass, JT; Stoner, BR
Published in: Journal of Materials Research
January 1, 1994

Highly oriented diamond thin films grown on silicon via microwave plasma chemical vapor deposition were examined by transmission electron microscopy. In the plan view, defects appearing at the grain boundary were easily observed. (100) faceted grains that appeared to have coalesced were connected at their interfaces by dislocations characteristic of a low angle grain boundary. From Burgers vector calculations and electron diffraction patterns, the azimuthal rotation between grains was measured to be between 0 and 6°. The defect densities of these films are compared to reports from (100) textured randomly oriented films, and the relative improvement due to the reduction of misorientation and grain boundary angles is discussed. © 1994, Materials Research Society. All rights reserved.

Duke Scholars

Published In

Journal of Materials Research

DOI

EISSN

2044-5326

ISSN

0884-2914

Publication Date

January 1, 1994

Volume

9

Issue

10

Start / End Page

2487 / 2489

Related Subject Headings

  • Materials
  • 5104 Condensed matter physics
  • 4017 Mechanical engineering
  • 4016 Materials engineering
  • 0913 Mechanical Engineering
  • 0912 Materials Engineering
  • 0204 Condensed Matter Physics
 

Citation

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Sivazlian, F. R., Glass, J. T., & Stoner, B. R. (1994). Investigation of the low angle grain boundaries in highly oriented diamond films via transmission electron microscopy. Journal of Materials Research, 9(10), 2487–2489. https://doi.org/10.1557/JMR.1994.2487
Sivazlian, F. R., J. T. Glass, and B. R. Stoner. “Investigation of the low angle grain boundaries in highly oriented diamond films via transmission electron microscopy.” Journal of Materials Research 9, no. 10 (January 1, 1994): 2487–89. https://doi.org/10.1557/JMR.1994.2487.
Sivazlian FR, Glass JT, Stoner BR. Investigation of the low angle grain boundaries in highly oriented diamond films via transmission electron microscopy. Journal of Materials Research. 1994 Jan 1;9(10):2487–9.
Sivazlian, F. R., et al. “Investigation of the low angle grain boundaries in highly oriented diamond films via transmission electron microscopy.” Journal of Materials Research, vol. 9, no. 10, Jan. 1994, pp. 2487–89. Scopus, doi:10.1557/JMR.1994.2487.
Sivazlian FR, Glass JT, Stoner BR. Investigation of the low angle grain boundaries in highly oriented diamond films via transmission electron microscopy. Journal of Materials Research. 1994 Jan 1;9(10):2487–2489.
Journal cover image

Published In

Journal of Materials Research

DOI

EISSN

2044-5326

ISSN

0884-2914

Publication Date

January 1, 1994

Volume

9

Issue

10

Start / End Page

2487 / 2489

Related Subject Headings

  • Materials
  • 5104 Condensed matter physics
  • 4017 Mechanical engineering
  • 4016 Materials engineering
  • 0913 Mechanical Engineering
  • 0912 Materials Engineering
  • 0204 Condensed Matter Physics