High Knudsen number fluid flow at near-standard temperature and pressure conditions using precision nanochannels

Gas flows over a wide range of Knudsen numbers (~0.5-10) are studied using silicon nanochannel arrays with slit-shaped pores. The pore sizes of the silicon nanochannel arrays range from micrometer to sub-10-nm scales. The flows are generated under conditions of room temperature and near-atmospheric pressure (~22°C and ~101-115 kPa) and span the continuum flow, continuum-slip flow, transition flow and free-molecular flow regimes. The measured flow rates of helium, argon and carbon dioxide are in good agreement with a theoretical model (Unified Slip Model) proposed by Beskok and Karniadakis (Nanoscale Microscale Thermophys Eng 3:43-77, 1999). © 2010 Springer-Verlag.

Full Text

Duke Authors

Cited Authors

  • Fissell, WH; Conlisk, AT; Datta, S; Magistrelli, JM; Glass, JT; Fleischman, AJ; Roy, S

Published Date

  • 2011

Published In

Volume / Issue

  • 10 / 2

Start / End Page

  • 425 - 433

International Standard Serial Number (ISSN)

  • 1613-4982

Digital Object Identifier (DOI)

  • 10.1007/s10404-010-0682-4

Citation Source

  • SciVal