High Knudsen number fluid flow at near-standard temperature and pressure conditions using precision nanochannels
Gas flows over a wide range of Knudsen numbers (~0.5-10) are studied using silicon nanochannel arrays with slit-shaped pores. The pore sizes of the silicon nanochannel arrays range from micrometer to sub-10-nm scales. The flows are generated under conditions of room temperature and near-atmospheric pressure (~22°C and ~101-115 kPa) and span the continuum flow, continuum-slip flow, transition flow and free-molecular flow regimes. The measured flow rates of helium, argon and carbon dioxide are in good agreement with a theoretical model (Unified Slip Model) proposed by Beskok and Karniadakis (Nanoscale Microscale Thermophys Eng 3:43-77, 1999). © 2010 Springer-Verlag.
Fissell, WH; Conlisk, AT; Datta, S; Magistrelli, JM; Glass, JT; Fleischman, AJ; Roy, S
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