Field emission characteristics of diamond coated silicon field emitters

Journal Article (Journal Article)

Single crystal silicon field emitters have been modified by surface deposition of diamond using bias-enhanced microwave plasma chemical vapor deposition. Polycrystalline diamond with a high nucleation density (1010/cm2) and small grain size (<20 nm) was achieved on silicon field emitters. Field emission from these diamond coated emitters exhibited significant enhancement both in total emission current and stability compared to pure silicon emitters. A large effective emitting area comparable to the tip surface area was obtained from a Fowler-Nordheim analysis. The effective work function of the polycrystalline diamond coated emitter surface was found to be larger than that of a pure silicon emitter surface.

Full Text

Duke Authors

Cited Authors

  • Liu, J; Zhirnov, VV; Myers, AF; Wojak, GJ; Choi, WB; Hren, JJ; Wolter, SD; McClure, MT; Stoner, BR; Glass, JT

Published Date

  • March 1, 1995

Published In

Volume / Issue

  • 13 / 2

Start / End Page

  • 422 - 426

International Standard Serial Number (ISSN)

  • 0734-211X

Digital Object Identifier (DOI)

  • 10.1116/1.587961

Citation Source

  • Scopus