Measurement of reactive and condensable gas permeation using a mass spectrometer

Journal Article (Academic article)

Duke Authors

Cited Authors

  • Zhang, XD; Lewis, JS; Parker, CB; Glass, JT; Wolter, SD

Published Date

  • September 2008

Published In

  • Journal of Vacuum Science \& Technology A

Volume / Issue

  • 26 / 5

Start / End Page

  • 1128 - 1137