Measurement of reactive and condensable gas permeation using a mass spectrometer
Publication
, Journal Article
Zhang, XD; Lewis, JS; Parker, CB; Glass, JT; Wolter, SD
Published in: Journal of Vacuum Science \& Technology a
September 2008
Duke Scholars
Published In
Journal of Vacuum Science \& Technology a
Publication Date
September 2008
Volume
26
Issue
5
Start / End Page
1128 / 1137
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 09 Engineering
- 02 Physical Sciences
Citation
APA
Chicago
ICMJE
MLA
NLM
Zhang, X. D., Lewis, J. S., Parker, C. B., Glass, J. T., & Wolter, S. D. (2008). Measurement of reactive and condensable gas permeation using a mass spectrometer. Journal of Vacuum Science \& Technology A, 26(5), 1128–1137.
Zhang, Xiao Dong, Jay S. Lewis, Charles B. Parker, Jeffrey T. Glass, and Scott D. Wolter. “Measurement of reactive and condensable gas permeation using a mass spectrometer.” Journal of Vacuum Science \& Technology A 26, no. 5 (September 2008): 1128–37.
Zhang XD, Lewis JS, Parker CB, Glass JT, Wolter SD. Measurement of reactive and condensable gas permeation using a mass spectrometer. Journal of Vacuum Science \& Technology a. 2008 Sep;26(5):1128–37.
Zhang, Xiao Dong, et al. “Measurement of reactive and condensable gas permeation using a mass spectrometer.” Journal of Vacuum Science \& Technology A, vol. 26, no. 5, Sept. 2008, pp. 1128–37.
Zhang XD, Lewis JS, Parker CB, Glass JT, Wolter SD. Measurement of reactive and condensable gas permeation using a mass spectrometer. Journal of Vacuum Science \& Technology a. 2008 Sep;26(5):1128–1137.
Published In
Journal of Vacuum Science \& Technology a
Publication Date
September 2008
Volume
26
Issue
5
Start / End Page
1128 / 1137
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 09 Engineering
- 02 Physical Sciences