Fabrication of an integrated nanofluidic chip using interferometric lithography

Journal Article

The fabrication of nanofluidic chips based on all-optical lithographic processes was analyzed to study fluid dynamics and biomolecular transport. Anisotropic etching and interferometric lithography were used to produce large areas of parallel, nanofluidic channels with different widths and depths. To create interfacing microchannels, standard optical lithography was also used with varying range of spatial scales on the chips. The technique was effective for providing flexible nanotexturing over large areas, high-throughput manufacturing, and produced a broad range of feature sizes on a single chip.

Cited Authors

  • II, MJO; Bisong, P; Ista, LK; Rabinovich, EM; Garcia, AL; Sibbett, SS; Lopez, GP; Brueck, SRJ

Published Date

  • 2003

Published In

Volume / Issue

  • 21 / 6

Start / End Page

  • 2941 - 2945

International Standard Serial Number (ISSN)

  • 1071-1023