Robust, common path, phase shifting interferometer and optical profilometer.

Journal Article (Journal Article)

We describe an improved implementation of our previously reported common-path, phase shifting, and shearing interferometer. Using a time-multiplexed phase shifting scheme, we demonstrate higher sampling resolution, better light sensitivity, and use of arbitrary phase shifting algorithms. We describe microscopic imaging of the surface profile of a copper-plated silicon wafer and demonstrate that the system is vibration insensitive with approximately lambda/100 repeatability. In a more general discussion of our method, we describe the different functional elements and suggest alternative designs and improvements. Possible uses include full-field coherent imaging and high dynamic range wavefront sensing, which we briefly discuss.

Full Text

Duke Authors

Cited Authors

  • Tumbar, R; Marks, DL; Brady, DJ

Published Date

  • April 2008

Published In

Volume / Issue

  • 47 / 10

Start / End Page

  • B32 - B43

PubMed ID

  • 18382549

Pubmed Central ID

  • 18382549

Electronic International Standard Serial Number (EISSN)

  • 1539-4522

International Standard Serial Number (ISSN)

  • 1559-128X

Digital Object Identifier (DOI)

  • 10.1364/ao.47.000b32


  • eng