Parallel lithographic fabrication of micro-optical lenslets by photoexpansion in chalcogenide glasses

Published

Journal Article

The non-locality of the photoexpansion effect as well as large volume changes observed in the fabrication of micro-lenses on the surface of As 2 S 3 (chalcogenide) glass was investigated experimentally. The parallel photolithographic process was used in micro-lens and lens array fabrication because of its distinct advantages over focused light techniques. The process allowed excellent control on feature size. The non-local expansion gave smooth rounded edges and a sufficiently small exposure resulted in a convex structure. Smaller lenslets seemed to preserve their convex structure and showed higher aspect ratios.

Duke Authors

Cited Authors

  • Ramachandran, S; Brady, DJ; Bishop, SG

Published Date

  • December 1, 1996

Published In

Volume / Issue

  • 1 /

Start / End Page

  • 284 - 285

International Standard Serial Number (ISSN)

  • 1092-8081

Citation Source

  • Scopus