Polymer waveguide optical interconnections on Si CMOS circuits
Optical interconnections, on foundry silicon complementary metal oxide semiconductors (CMOS) circuits using polymer optical waveguides, was demonstrated. The polymer optical waveguides were directly fabricated on two Si CMOS circuits. The channel in the fabricated waveguide was defined by reactive ion etching through silica hard mask. Results indicated that increase in the incident optical power into the optical waveguide resulted in increase in the mean of the bit stream samples.