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Thin film GaN metal-semiconductor-metal photodetectors integrated onto silicon

Publication ,  Journal Article
Seo, S; Kang, S; Huang, S; Lee, K; Doolittle, W; Jokerst, N; Brown, A; Brooke, M
Published in: Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
January 1, 2002

The metal-semiconductor-metal (MSM) photodetector dark current and responsivity results for the growth of gallium nitride on lithium gallate substrates were reported. The heterogeneous integration of thin film gallium nitride MSM detectors onto host substrates was discussed. It was found that the dark current before and after bonding is competitive and does not change significantly after integration.

Duke Scholars

Published In

Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Publication Date

January 1, 2002

Start / End Page

630 / 631
 

Citation

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Seo, S., Kang, S., Huang, S., Lee, K., Doolittle, W., Jokerst, N., … Brooke, M. (2002). Thin film GaN metal-semiconductor-metal photodetectors integrated onto silicon. Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, 630–631.
Seo, S., S. Kang, S. Huang, K. Lee, W. Doolittle, N. Jokerst, A. Brown, and M. Brooke. “Thin film GaN metal-semiconductor-metal photodetectors integrated onto silicon.” Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, January 1, 2002, 630–31.
Seo S, Kang S, Huang S, Lee K, Doolittle W, Jokerst N, et al. Thin film GaN metal-semiconductor-metal photodetectors integrated onto silicon. Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. 2002 Jan 1;630–1.
Seo, S., et al. “Thin film GaN metal-semiconductor-metal photodetectors integrated onto silicon.” Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, Jan. 2002, pp. 630–31.
Seo S, Kang S, Huang S, Lee K, Doolittle W, Jokerst N, Brown A, Brooke M. Thin film GaN metal-semiconductor-metal photodetectors integrated onto silicon. Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. 2002 Jan 1;630–631.

Published In

Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Publication Date

January 1, 2002

Start / End Page

630 / 631