Thin film GaN metal-semiconductor-metal photodetectors integrated onto silicon
Publication
, Journal Article
Seo, S; Kang, S; Huang, S; Lee, K; Doolittle, W; Jokerst, N; Brown, A; Brooke, M
Published in: Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
January 1, 2002
The metal-semiconductor-metal (MSM) photodetector dark current and responsivity results for the growth of gallium nitride on lithium gallate substrates were reported. The heterogeneous integration of thin film gallium nitride MSM detectors onto host substrates was discussed. It was found that the dark current before and after bonding is competitive and does not change significantly after integration.
Duke Scholars
Published In
Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Publication Date
January 1, 2002
Start / End Page
630 / 631
Citation
APA
Chicago
ICMJE
MLA
NLM
Seo, S., Kang, S., Huang, S., Lee, K., Doolittle, W., Jokerst, N., … Brooke, M. (2002). Thin film GaN metal-semiconductor-metal photodetectors integrated onto silicon. Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, 630–631.
Seo, S., S. Kang, S. Huang, K. Lee, W. Doolittle, N. Jokerst, A. Brown, and M. Brooke. “Thin film GaN metal-semiconductor-metal photodetectors integrated onto silicon.” Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, January 1, 2002, 630–31.
Seo S, Kang S, Huang S, Lee K, Doolittle W, Jokerst N, et al. Thin film GaN metal-semiconductor-metal photodetectors integrated onto silicon. Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. 2002 Jan 1;630–1.
Seo, S., et al. “Thin film GaN metal-semiconductor-metal photodetectors integrated onto silicon.” Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, Jan. 2002, pp. 630–31.
Seo S, Kang S, Huang S, Lee K, Doolittle W, Jokerst N, Brown A, Brooke M. Thin film GaN metal-semiconductor-metal photodetectors integrated onto silicon. Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. 2002 Jan 1;630–631.
Published In
Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Publication Date
January 1, 2002
Start / End Page
630 / 631