GaN thin film material bonded to host substrates using selective chemical etching

Journal Article

GaN-based materials and devices are drawing significant interest for ultraviolet and blue optical device applications, and high power electronic device applications. An alternative approach toward GaN thin film separation and integration on dissimilar materials is presented and demonstrated.

Duke Authors

Cited Authors

  • Lee, K; Seo, S; Vrazel, M; Huang, S; Doolittle, W; Jokerst, N; Brown, A

Published Date

  • 2000

Published In

  • Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

Volume / Issue

  • 2 /

Start / End Page

  • 559 - 560