The glow discharge reaction of cyclopentadienyldicarbonylcobalt(I) CpCo(CO)2 was carried out in an inductively coupled cylindrical reactor at various flow rates and rf power levels. The deposition rate at low ratios of power to flow rate (W/F) is highest near the monomer inlet; a relatively uniform deposition rate distribution is observed at higher values of W/F. This suggests a plasma reaction of relatively rapid kinetics occurring at low W/F but not at higher W/F. The product of this reaction deposited at the monomer inlet was analyzed by infrared and 1Hnmr spectroscopy and was found to include the cluster complex tris(η5-cyclopentadienylcobaltmonocarbonyl), [CpCo(CO)]3. The maximum yield of [CpCo(CO)]3 was obtained at the lowest W/F attainable with our reactor. © 1984.