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Optical detection heterogeneously integrated with a coplanar digital microfluidic lab-on-a-chip platform

Publication ,  Journal Article
Evans, R; Luan, L; Jokerst, NM; Fair, RB
Published in: Proceedings of IEEE Sensors
December 1, 2007

The intimate integration of optical components with microfluidics technology will enable next generation portable LoC systems that may completely contain optical generation, processing, and detection. Toward the chip scale integration of digital microfluidics with active compound semiconductor devices, heterogeneous integration technology is used in this paper to integrate thin film (approx 1 micron thick) compound semiconductor photodetectors with digital microfluidic systems. Each thin film InGaAs photodetector is bonded onto a glass platform, coated with Teflon AF, and integrated into the digital microfluidics system. The detection function is tested using the mixing and digital droplet movement of chemiluminescent compounds, which clearly indicate the functionality of the microfluidics system and the integrated thin film InGaAs photodetector. © 2007 IEEE.

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Published In

Proceedings of IEEE Sensors

DOI

Publication Date

December 1, 2007

Start / End Page

423 / 426
 

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Evans, R., Luan, L., Jokerst, N. M., & Fair, R. B. (2007). Optical detection heterogeneously integrated with a coplanar digital microfluidic lab-on-a-chip platform. Proceedings of IEEE Sensors, 423–426. https://doi.org/10.1109/ICSENS.2007.4388426
Evans, R., L. Luan, N. M. Jokerst, and R. B. Fair. “Optical detection heterogeneously integrated with a coplanar digital microfluidic lab-on-a-chip platform.” Proceedings of IEEE Sensors, December 1, 2007, 423–26. https://doi.org/10.1109/ICSENS.2007.4388426.
Evans R, Luan L, Jokerst NM, Fair RB. Optical detection heterogeneously integrated with a coplanar digital microfluidic lab-on-a-chip platform. Proceedings of IEEE Sensors. 2007 Dec 1;423–6.
Evans, R., et al. “Optical detection heterogeneously integrated with a coplanar digital microfluidic lab-on-a-chip platform.” Proceedings of IEEE Sensors, Dec. 2007, pp. 423–26. Scopus, doi:10.1109/ICSENS.2007.4388426.
Evans R, Luan L, Jokerst NM, Fair RB. Optical detection heterogeneously integrated with a coplanar digital microfluidic lab-on-a-chip platform. Proceedings of IEEE Sensors. 2007 Dec 1;423–426.

Published In

Proceedings of IEEE Sensors

DOI

Publication Date

December 1, 2007

Start / End Page

423 / 426