Microelectromechanical systems: a new technology for biomedical applications

Journal Article

Microelectromechanical systems on a scale as small as a few micrometers can be fabricated using photolithographic and anisotropic etching processes on single crystal substrates such as silicon. Processing steps similar to those used to fabricate integrated circuit chips are used to form these three-dimensional structures. This mini-symposium will examine the underlying physical principles, fabrication processes, and applications for this new technology. Special emphasis will be placed on applications and potential applications in the life sciences and clinical medicine.

Duke Authors

Cited Authors

  • Neuman, MR; Fair, RB; Mehragany, M; Massoud, HZ

Published Date

  • December 1, 1993

Published In

Volume / Issue

  • 15 / pt 3

Start / End Page

  • 1545 - 1546

International Standard Serial Number (ISSN)

  • 0589-1019

Citation Source

  • Scopus