A novel ion source and detector for a miniature mass spectrometer

Due to its flexibility and sensitivity, mass spectrometry is a preferred sensing method for applications ranging from explosives detection to air quality monitoring. The key functional elements of a mass spectrometer are ionization, mass separation, and ion detection. This work describes the development of two enabling technologies for the realization of a miniature mass spectrometer - an on-chip electron impact ion source and a micro Faraday cup array for ion detection. The small, power efficient ion source based on field emission of carbon nanotubes is the first reported lateral on-chip ion source using a cold cathode. The detector array is a linear array of Faraday cups created with a novel fabrication process that allows for much shorter cup spacing than previously achieved. When combined with a static magnetic field for ion separation, these components will enable a miniature, power efficient mass spectrometer. © 2007 IEEE.

Full Text

Duke Authors

Cited Authors

  • Gilchrist, KH; Bower, CA; Lueck, MR; Piascik, JR; Stoner, BR; Natarajan, S; Parker, CB; Glass, JT

Published Date

  • 2007

Published In

  • Proceedings of IEEE Sensors

Start / End Page

  • 1372 - 1375

Digital Object Identifier (DOI)

  • 10.1109/ICSENS.2007.4388667

Citation Source

  • SciVal