High voltage compatible micromachined vacuum electronic devices with carbon nanotube cold cathodes

Journal Article

Previously, Bower et al. [1] demonstrated a microfabricated vacuum microtriode with an integrated carbon nanotube field emission cathode. One of the main limitations of the microtriode was the inadequate device insulation which suffered from leakage currents and electrical breakdown at fewer than 200 Volts. Here, we report similar micromachined vacuum electronic devices fabricated to withstand voltages in excess of 1000 Volts. The DC electrical characteristics of a microtriode were obtained at grid and anode voltage levels significantly higher than previously reported. The field emission performance of the MPECVD grown carbon nanotube cold cathode is described. Implications for future on-chip microfabricated vacuum electronic devices will be discussed. © 2006 IEEE.

Duke Authors

Cited Authors

  • Bower, CA; Gilchrist, KH; Broderick, S; Piascik, JR; Stoner, BR; Parker, CB; Natarajan, S; Wolter, SD; Glass, JT

Published Date

  • December 1, 2006

Published In

  • 2006 Ieee International Vacuum Electronics Conference Held Jointly With 2006 Ieee International Vacuum Electron Sources, Ivec/Ivesc 2006

Start / End Page

  • 471 - 472

Citation Source

  • Scopus