Chip scale integrated microresonators for sensing applications
Miniaturized, portable sensing systems for medical and environmental diagnostics and monitoring are an excellent application area for microresonator sensors. Polymer microresonators are attractive components for chip scale integrated sensing because they can be integrated in a planar format using standard semiconductor manufacturing technologies. Vertically coupled microresonators, where the waveguides lie below or above the microresonator, can be fabricated using standard photolithography, enabling low cost integrated sensor systems. Microresonators can be surface customized for discrimination in, for example, chemical sensing applications, or the surface can be functionalized for biological sensing applications. To create chip scale integrated sensing systems, microresonators can be integrated with planar optical system components, such as polymer waveguides and thin film photodetectors, onto silicon using heterogeneous integration. Heterogeneous integration can also be used to integrate optical sources with sensors onto host substrates such as silicon.
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- 5102 Atomic, molecular and optical physics
- 4009 Electronics, sensors and digital hardware
- 4006 Communications engineering
Citation
Published In
DOI
ISSN
Publication Date
Volume
Related Subject Headings
- 5102 Atomic, molecular and optical physics
- 4009 Electronics, sensors and digital hardware
- 4006 Communications engineering