Vertically coupled polymer microdisk resonators fabricated by photolithography technique
Journal Article
In this paper, a vertically coupled polymer microdisk resonator has been demonstrated and characterized. This vertically coupled resonator is fabricated using polymers instead of semiconductors, as well as standard photolithography instead of electron beam lithography (EBL), in contrast to laterally coupled polymer devices. This vertically coupled structure and fabrication process enables simpler mass manufacture of the microresonators in arrays at the chip scale for applications including integrated sensing and chip scale WDM filters. © 2007 IEEE.
Full Text
Duke Authors
Cited Authors
- Luan, L; Cho, SY; Jokerst, NM
Published Date
- October 22, 2007
Published In
Start / End Page
- 2035 - 2040
International Standard Serial Number (ISSN)
- 0569-5503
Digital Object Identifier (DOI)
- 10.1109/ECTC.2007.374082
Citation Source
- Scopus