Polymer microrings integrated with thin film ingaas MSM photodetectors for Sensor-on-a-Chip applications
Journal Article
A polymer microring has been integrated with an InGaAs photodetector on a Si substrate for chip scale sensing applications. The photocurrent as a function of wavelength agrees well with the spectral response of the microring. This integration of a microring and photodetector onto Si is a first step toward the next generation of "Sensor-on-a-Chip" integrated systems. © 2006 IEEE.
Duke Authors
Cited Authors
- Cho, SY; Jokerst, NM
Published Date
- December 1, 2006
Published In
Volume / Issue
- 2006 /
Start / End Page
- 222 - 225
International Standard Serial Number (ISSN)
- 1092-8669
Citation Source
- Scopus