Polymer microrings integrated with thin film ingaas MSM photodetectors for Sensor-on-a-Chip applications

Journal Article

A polymer microring has been integrated with an InGaAs photodetector on a Si substrate for chip scale sensing applications. The photocurrent as a function of wavelength agrees well with the spectral response of the microring. This integration of a microring and photodetector onto Si is a first step toward the next generation of "Sensor-on-a-Chip" integrated systems. © 2006 IEEE.

Duke Authors

Cited Authors

  • Cho, S-Y; Jokerst, NM

Published Date

  • 2006

Published In

Volume / Issue

  • 2006 /

Start / End Page

  • 222 - 225

International Standard Serial Number (ISSN)

  • 1092-8669