Modal pattern analysis and experimental investigation of multimode interferometric sensing: A path to fully integrated silicon-CMOS-based chem/bio sensors

Journal Article

A multimode, Mach-Zehnder, chem/bio sensor with sensitivity developed through modal pattern analysis is demonstrated on silicon. Simulated and experimental data show that waveguide structures less than 5000-μm-long enable fully-integrated sensors with index sensitivities near 3×10 -6 and methanol-in-vapor sensitivities near 250 parts-per-billion vapor (ppbv).

Duke Authors

Cited Authors

  • Lillie, JJ; Thomas, MA; Dennis, KA; Jokerst, NM; Henderson, C; Ralph, SE

Published Date

  • 2004

Published In

Volume / Issue

  • 1 /

Start / End Page

  • 352 - 353

International Standard Serial Number (ISSN)

  • 1092-8081