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Modal pattern analysis and experimental investigation of multimode interferometric sensing: A path to fully integrated silicon-CMOS-based chem/bio sensors

Publication ,  Journal Article
Lillie, JJ; Thomas, MA; Dennis, KA; Jokerst, NM; Henderson, C; Ralph, SE
Published in: Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
December 1, 2004

A multimode, Mach-Zehnder, chem/bio sensor with sensitivity developed through modal pattern analysis is demonstrated on silicon. Simulated and experimental data show that waveguide structures less than 5000-μm-long enable fully-integrated sensors with index sensitivities near 3×10 -6 and methanol-in-vapor sensitivities near 250 parts-per-billion vapor (ppbv).

Duke Scholars

Published In

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

ISSN

1092-8081

Publication Date

December 1, 2004

Volume

1

Start / End Page

352 / 353
 

Citation

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Lillie, J. J., Thomas, M. A., Dennis, K. A., Jokerst, N. M., Henderson, C., & Ralph, S. E. (2004). Modal pattern analysis and experimental investigation of multimode interferometric sensing: A path to fully integrated silicon-CMOS-based chem/bio sensors. Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, 1, 352–353.
Lillie, J. J., M. A. Thomas, K. A. Dennis, N. M. Jokerst, C. Henderson, and S. E. Ralph. “Modal pattern analysis and experimental investigation of multimode interferometric sensing: A path to fully integrated silicon-CMOS-based chem/bio sensors.” Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS 1 (December 1, 2004): 352–53.
Lillie JJ, Thomas MA, Dennis KA, Jokerst NM, Henderson C, Ralph SE. Modal pattern analysis and experimental investigation of multimode interferometric sensing: A path to fully integrated silicon-CMOS-based chem/bio sensors. Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS. 2004 Dec 1;1:352–3.
Lillie, J. J., et al. “Modal pattern analysis and experimental investigation of multimode interferometric sensing: A path to fully integrated silicon-CMOS-based chem/bio sensors.” Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, vol. 1, Dec. 2004, pp. 352–53.
Lillie JJ, Thomas MA, Dennis KA, Jokerst NM, Henderson C, Ralph SE. Modal pattern analysis and experimental investigation of multimode interferometric sensing: A path to fully integrated silicon-CMOS-based chem/bio sensors. Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS. 2004 Dec 1;1:352–353.

Published In

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

ISSN

1092-8081

Publication Date

December 1, 2004

Volume

1

Start / End Page

352 / 353