Polymer waveguide optical interconnections for electrical interconnection substrates
Integration process and measured result of a fully embedded thin film metal-semiconductor-metal (MSM) photodetector (PD) fabricated from InGaAs were presented. The channel in the fabricated waveguide was defined by reactive ion etching. The optical signal was launched into the optical waveguide by an optical fiber connected to a commercial laser. Measured dark and photocurrent were 60.6 nA and 1.2 μA at 5 V, and estimated coupling efficiency from the input optical waveguide to the embedded MSM PD was 71.74%.