Polymer waveguide optical interconnections for electrical interconnection substrates

Journal Article

Integration process and measured result of a fully embedded thin film metal-semiconductor-metal (MSM) photodetector (PD) fabricated from InGaAs were presented. The channel in the fabricated waveguide was defined by reactive ion etching. The optical signal was launched into the optical waveguide by an optical fiber connected to a commercial laser. Measured dark and photocurrent were 60.6 nA and 1.2 μA at 5 V, and estimated coupling efficiency from the input optical waveguide to the embedded MSM PD was 71.74%.

Duke Authors

Cited Authors

  • Cho, SY; Jokerst, NM

Published Date

  • January 1, 2002

Published In

  • Pacific Rim Conference on Lasers and Electro Optics, Cleo Technical Digest

Start / End Page

  • 161 - 162

Citation Source

  • Scopus