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Polymer waveguide optical interconnections for electrical interconnection substrates

Publication ,  Journal Article
Cho, SY; Jokerst, NM
Published in: Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
January 1, 2002

Integration process and measured result of a fully embedded thin film metal-semiconductor-metal (MSM) photodetector (PD) fabricated from InGaAs were presented. The channel in the fabricated waveguide was defined by reactive ion etching. The optical signal was launched into the optical waveguide by an optical fiber connected to a commercial laser. Measured dark and photocurrent were 60.6 nA and 1.2 μA at 5 V, and estimated coupling efficiency from the input optical waveguide to the embedded MSM PD was 71.74%.

Duke Scholars

Published In

Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Publication Date

January 1, 2002

Start / End Page

161 / 162
 

Citation

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Cho, S. Y., & Jokerst, N. M. (2002). Polymer waveguide optical interconnections for electrical interconnection substrates. Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, 161–162.
Cho, S. Y., and N. M. Jokerst. “Polymer waveguide optical interconnections for electrical interconnection substrates.” Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, January 1, 2002, 161–62.
Cho SY, Jokerst NM. Polymer waveguide optical interconnections for electrical interconnection substrates. Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. 2002 Jan 1;161–2.
Cho, S. Y., and N. M. Jokerst. “Polymer waveguide optical interconnections for electrical interconnection substrates.” Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, Jan. 2002, pp. 161–62.
Cho SY, Jokerst NM. Polymer waveguide optical interconnections for electrical interconnection substrates. Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. 2002 Jan 1;161–162.

Published In

Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Publication Date

January 1, 2002

Start / End Page

161 / 162