Drift-Free, 1000G Mechanical Shock Tolerant Single-Crystal Silicon Two-Axis MEMS Tilting Mirrors in a 1000×1000-Port Optical Crossconnect

Journal Article

We report drift-free two-axis tilting MEMS mirrors fabricated from single crystal silicon. These micromirrors survive 1000G mechanical shocks and exhibit angular stability better than 4 millidegrees under simulated office vibrations. Two hermetically sealed mirror arrays were used to build a low-loss non-blocking 1000×1000-port optical cross-connect switch. © Optical Society of America.

Duke Authors

Cited Authors

  • Gasparyan, A; Shea, H; Arney, S; Aksyuk, V; Simon, ME; Pardo, F; Chan, HB; Kim, J; Gates, J; Kraus, JS; Goyal, S; Carr, D; Kleiman, R

Published Date

  • 2003

Published In

  • Conference on Optical Fiber Communication, Technical Digest Series

Volume / Issue

  • 86 /

Start / End Page

  • 908 - 910