Drift-Free, 1000G Mechanical Shock Tolerant Single-Crystal Silicon Two-Axis MEMS Tilting Mirrors in a 1000×1000-Port Optical Crossconnect
We report drift-free two-axis tilting MEMS mirrors fabricated from single crystal silicon. These micromirrors survive 1000G mechanical shocks and exhibit angular stability better than 4 millidegrees under simulated office vibrations. Two hermetically sealed mirror arrays were used to build a low-loss non-blocking 1000×1000-port optical cross-connect switch. © Optical Society of America.
- Gasparyan, A; Shea, H; Arney, S; Aksyuk, V; Simon, ME; Pardo, F; Chan, HB; Kim, J; Gates, J; Kraus, JS; Goyal, S; Carr, D; Kleiman, R
- Conference on Optical Fiber Communication, Technical Digest Series
Volume / Issue
- 86 /
Start / End Page
- 908 - 910