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Optical scanner using a MEMS actuator

Publication ,  Journal Article
Zara, JM; Smith, SW
Published in: Sensors and Actuators, A: Physical
December 1, 2002

Optical scanners have numerous applications from bar code readers and laser printers in industry to corneal resurfacing and optical coherence tomography in medicine. We have developed an optical scanner fabricated using photolithography on a polyimide substrate. Tiffs scanner uses an electrostatic microelectromechanical system (MEMS) actuator to tilt a gold-coated mirror resting on 3 μm thick polyimide torsion hinges to steer an optical beam. The linear actuator used is the integrated force array (IFA), a network of hundreds of thousands of deformable capacitors, which electrostatically contract with an applied differential voltage. IFAs are 2.2 μm thick patterned, metallized polyimide films 1 cm long and either 1 or 3 mm wide depending on the application. The mirror support structures were modeled using one-dimensional beam theory and ANSYS finite element analysis and then fabricated using a three-layer process with polyimide and gold on silicon wafers. Side scanning structures have been fabricated with tables 1.125 or 2.25 mm wide. The completed devices were coated with a 500 Å thick conformal coating of parylene for protection from the environment. These devices have demonstrated optical scan angles up to 146° for applied voltages up to ±50 V. These devices were also used to steer a laser beam in a prototype bar code reader to demonstrate functionality. © 2002 Published by Elsevier Science B.V.

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Published In

Sensors and Actuators, A: Physical

DOI

ISSN

0924-4247

Publication Date

December 1, 2002

Volume

102

Issue

1-2

Start / End Page

176 / 184

Related Subject Headings

  • Nanoscience & Nanotechnology
  • 4017 Mechanical engineering
  • 4009 Electronics, sensors and digital hardware
  • 4008 Electrical engineering
  • 0913 Mechanical Engineering
  • 0912 Materials Engineering
  • 0906 Electrical and Electronic Engineering
 

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Zara, J. M., & Smith, S. W. (2002). Optical scanner using a MEMS actuator. Sensors and Actuators, A: Physical, 102(1–2), 176–184. https://doi.org/10.1016/S0924-4247(02)00302-3
Zara, J. M., and S. W. Smith. “Optical scanner using a MEMS actuator.” Sensors and Actuators, A: Physical 102, no. 1–2 (December 1, 2002): 176–84. https://doi.org/10.1016/S0924-4247(02)00302-3.
Zara JM, Smith SW. Optical scanner using a MEMS actuator. Sensors and Actuators, A: Physical. 2002 Dec 1;102(1–2):176–84.
Zara, J. M., and S. W. Smith. “Optical scanner using a MEMS actuator.” Sensors and Actuators, A: Physical, vol. 102, no. 1–2, Dec. 2002, pp. 176–84. Scopus, doi:10.1016/S0924-4247(02)00302-3.
Zara JM, Smith SW. Optical scanner using a MEMS actuator. Sensors and Actuators, A: Physical. 2002 Dec 1;102(1–2):176–184.
Journal cover image

Published In

Sensors and Actuators, A: Physical

DOI

ISSN

0924-4247

Publication Date

December 1, 2002

Volume

102

Issue

1-2

Start / End Page

176 / 184

Related Subject Headings

  • Nanoscience & Nanotechnology
  • 4017 Mechanical engineering
  • 4009 Electronics, sensors and digital hardware
  • 4008 Electrical engineering
  • 0913 Mechanical Engineering
  • 0912 Materials Engineering
  • 0906 Electrical and Electronic Engineering