Spiral Wound Transducer
Publication
, Journal Article
Elliott, PC; Bobbio, SM; Pennington, MA; Smith, SW; Zara, J; Hudak, J; Pagan, J; Rouse, BJ
Published in: Proceedings of SPIE - The International Society for Optical Engineering
December 1, 2000
The Spiral Wound Transducer (SWT) is a muscle-like actuator comprising an array of deformable capacitors. The SWT is fabricated as a flat multilayer metallized plastic structure on a silicon wafer. Conventional microelectronic manufacturing techniques are used and will be described. The novel aspect of fabrication occurs after the flat SWT structures (tapes) are lifted off the wafer. In order to form a volumetric three-dimensional actuator the tapes are wound up upon themselves and bonded using a laminating process. This work as well as a characterization of the performance of the SWTs will be presented.
Duke Scholars
Published In
Proceedings of SPIE - The International Society for Optical Engineering
DOI
ISSN
0277-786X
Publication Date
December 1, 2000
Volume
4176
Start / End Page
130 / 139
Citation
APA
Chicago
ICMJE
MLA
NLM
Elliott, P. C., Bobbio, S. M., Pennington, M. A., Smith, S. W., Zara, J., Hudak, J., … Rouse, B. J. (2000). Spiral Wound Transducer. Proceedings of SPIE - The International Society for Optical Engineering, 4176, 130–139. https://doi.org/10.1117/12.395621
Elliott, P. C., S. M. Bobbio, M. A. Pennington, S. W. Smith, J. Zara, J. Hudak, J. Pagan, and B. J. Rouse. “Spiral Wound Transducer.” Proceedings of SPIE - The International Society for Optical Engineering 4176 (December 1, 2000): 130–39. https://doi.org/10.1117/12.395621.
Elliott PC, Bobbio SM, Pennington MA, Smith SW, Zara J, Hudak J, et al. Spiral Wound Transducer. Proceedings of SPIE - The International Society for Optical Engineering. 2000 Dec 1;4176:130–9.
Elliott, P. C., et al. “Spiral Wound Transducer.” Proceedings of SPIE - The International Society for Optical Engineering, vol. 4176, Dec. 2000, pp. 130–39. Scopus, doi:10.1117/12.395621.
Elliott PC, Bobbio SM, Pennington MA, Smith SW, Zara J, Hudak J, Pagan J, Rouse BJ. Spiral Wound Transducer. Proceedings of SPIE - The International Society for Optical Engineering. 2000 Dec 1;4176:130–139.
Published In
Proceedings of SPIE - The International Society for Optical Engineering
DOI
ISSN
0277-786X
Publication Date
December 1, 2000
Volume
4176
Start / End Page
130 / 139