Microelectromechanical actuator with extended range and enhanced force: fabrication, test, and application as a mechanical scanner


Journal Article

A miniature ultrasound scanner has been constructed using a MEMS actuator called an Integrated Force Array (IFA). A second type of actuator called a Spiral Wound Transducer (SWT) is under development and shows significant promise for this application. Both the scanner and SWT will be discussed.

Duke Authors

Cited Authors

  • Bobbio, SM; Smith, SW; Zara, J; Goodwin-Johansson, S; Hudak, J; DuBois, T; Leamy, H; Godwin, J; Pennington, M

Published Date

  • December 1, 1999

Published In

Volume / Issue

  • 3673 /

Start / End Page

  • 210 - 218

International Standard Serial Number (ISSN)

  • 0277-786X

Citation Source

  • Scopus